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タイトル: 結晶方位分布関数を用いたTiCN配向膜のX線応力測定
その他のタイトル: X-Ray Stress Measurement of Textured TiCN Films Using Crystallite Orientation Distribution Function
著者: 江尻, 正一
後藤, 昌英 link image link image
佐々木, 敏彦 link image link image
広瀬, 幸雄 link image link image
Ejiri, Shoichi
Goto, Masahide
Sasaki, Toshihiko
Hirose, Yukio
発行日: 2005年 8月15日
出版社(者): 日本材料学会 = Society of Materials Science, Japan
雑誌名: 材料 = Journal of the Society of Materials Science, Japan
ISSN: 0514-5163
巻: 54
号: 8
開始ページ: 881
終了ページ: 886
キーワード: TiCN films
X-ray stress measurement
Crystallite orientation distribution function
Fiber texture
Arc ion plating
抄録: The X-ray stress measurement is an effective method of nondestructive inspection for the residual stress in the surface layer of steel materials. However, the sin^2 ψ method, which is commonly used as X-ray stress measurement, is inapplicable to such anisotropic materials as textured materials because the theory supposes isotropic elastic polycrystalline materials as sample. The applicable X-ray stress measurement to textured materials was investigated on the assumption that information about each crystallite orientation was deduced by crystallite orientation distribution (ODF). Applied to measure the stress of the titanium carbide nitride (TiCN) film with the <111> preferred orientation, the residual stress value was determined from the measured lattice strain. The strong compressive stress value was observed in the film. Compared with methods of other models, the result indicated a small difference from the <111> ideal fiber texture model and was situated between the texture model and sin^2 ψ method.
URI: http://hdl.handle.net/2297/16793
関連URI: http://ci.nii.ac.jp/naid/110006266593/
資料種別: Journal Article
権利関係: 本文データは日本材料学会の許諾に基づきCiNiiから複製したものである
版表示: publisher

このアイテムを引用あるいはリンクする場合は次の識別子を使用してください。 http://hdl.handle.net/2297/16793



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