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タイトル: 繊維配向を有する TiN および TiCN 薄膜の熱による残留応力変化にともなう機械的強度への一影響(<特集>X 線材料強度)
その他のタイトル: An Effect of Residual Stress on Mechanical Strength of TiN and TiCN Thin Films Having Fiber Texture due to Heat Treatment(<Special Issue>X-Ray Study on Deformation and Fracture of Solid)
著者: 後藤, 昌英 link image link image
佐々木, 敏彦 link image link image
広瀬, 幸雄 link image link image
Goto, Masahide
Sasaki, Toshihiko
Hirose, Yukio
発行日: 2003年 7月15日
出版社(者): 日本材料学会 = Society of Materials Science, Japan
雑誌名: 材料 = Journal of the Society of Materials Science, Japan
ISSN: 0514-5163
巻: 52
号: 7
開始ページ: 744
終了ページ: 749
キーワード: TiN
TiCN
Thin films
Annealing
X-ray diffraction
Orientation distribution function
Residual stress
Dynamic hardness
Scratch test
抄録: TiN and TiCN thin films are used as antiwear layer on parts such as metal cutting tools. It is reported that the thin films that are deposited ceramics and metals have preferred orientation, and that the residual stresses generate by the difference in the coefficients of thermal expansion between the thin films and the substrate. Tools coated with TiN and TiCN films are heated to high temperature during service due to the frictional heat. Under this condition, the texture and the residual stress should change due to the heat. In the material engineering, it is well known that the residual stress in the material affects the mechanical strength of the industrial products. The purpose of this study is to examine the effect of the residual stress on the mechanical strength of TiN and TiCN thin films having preferred orientation. In this study, speciments that are deposited TiN and TiCN respectively by Physical Vapor Deposition (PVD) were annealed in a furnace at temperature of 573K, 798K, 843K and 893K. Using X-ray diffraction technique, the crystallite orientation was evaluated by the pole figure and the crystallite orientation distribution function (ODF). The films exhibited {111} fiber texture. After that, the residual stress of thin films was measured using CoKα radiation with the two-exposure method at Ψ=39°and 75°. Since the relationship between the mechanical strength and the residual stress has not been revealed about the thin film materials, the effect of the residual stress on the mechanical strength of the TiN and TiCN thin films having preferred orientation was investigated by the dynamic hardness (DH) and the scratch test. As a result, although the ODF little changed due to the heat treatment, the residual compressive stress relaxed at higher temperatures than 573K. As for the hardness of thin films, the residual stress did not affect the hardness. However, the residual stress influenced the behavior of the scratch test. The abrasive wear and the micro cracks were decreased by highly residual compressive stress.
URI: http://hdl.handle.net/2297/16794
関連URI: http://ci.nii.ac.jp/naid/110002302163/
資料種別: Journal Article
権利関係: 本文データは日本材料学会の許諾に基づきCiNiiから複製したものである
版表示: publisher
出現コレクション:1.査読済論文(工)

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