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タイトル: Size distribution of droplets in film prepared by pulsed laser ablation
著者: Yonezawa, Yasuto
Minamikawa, Toshiharu
Matsuda, Kazuko
Takezawa, Katsuhito
Morimoto, Akiharu link image link image
Shimizu, Tatsuo
森本, 章治
発行日: 1998年 5月
出版社(者): Elsevier
引用: Applied Surface Science 127-129, pp. 639-644
雑誌名: Applied Surface Science
ISSN: 0169-4332
巻: 127-129
開始ページ: 639
終了ページ: 644
キーワード: Pulse laser ablation (PLA)
Scanning tunneling microscope (STM)
Thin film
抄録: Volume and size distribution of droplets in oxide films were investigated for a variety of laser fluences, wavelengths and target temperatures. Effects of both the ambient gas pressure and the substrate temperature on the droplet formation was investigated. It was found that the increase in the ratio of the droplet volume to the film volume Vd/Vf caused by increasing the maximum etching depth of target per laser shot de (Vd/Vfde3, as previously reported) due to changes in the deposition conditions other than the target temperature is mainly attributed to an increase in the formation of large droplets. It was also found that the correlation Vd/Vfde3 is also valid for elevated target-temperatures, and the increase in the target temperature enhances the formation of small droplets compared with large ones. The effect of cooling of droplets after the ejection from the target due to the ambient pressure and/or the substrate temperature is discussed.
URI: http://hdl.handle.net/2297/1876
関連URI: http://dx.doi.org/10.1016/S0169-4332(97)00718-6
資料種別: Journal Article
版表示: author

このアイテムを引用あるいはリンクする場合は次の識別子を使用してください。 http://hdl.handle.net/2297/1876



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