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タイトル: Atomic oxygen sensing using a quartz crystal microbalance with a polymer thin film prepared by RF sputtering
著者: Matsumoto, Hiroyuki
Matsuoka, Mikihiro
Iwamori, Satoru link image
Noda, Kazutoshi
松本, 裕之
岩森, 暁
発行日: 2010年
出版社(者): MYU Tokyo
雑誌名: Sensors and Materials
ISSN: 0914-4935
巻: 22
号: 2
開始ページ: 61
終了ページ: 70
キーワード: Atomic oxygen
Quartz crystal microbalance
RF sputtering
抄録: Polymer thin films, sputtered using a polyimide target on a quartz crystal, were investigated to determine their suitability for application in active oxygen sensors. Active oxygen generated under an inductively coupled plasma (ICP), particularly atomic oxygen radicals with a flux of 6.93x1013 atoms/cm2/s, was successfully detected from the frequency shift using a polymer-coated quartz crystal microbalance (QCM). To investigate the reaction mechanism between the polymer surface and atomic oxygen, chemical bonding was evaluated by electron spectroscopy for chemical analysis (ESCA) and surface morphology by atomic force microscopy (AFM). We also compared sputtercoated polymers with spin-coated polymers in terms of their sensing characteristics. We found that a sputter-coated polymer QCM has a great potential for atomic oxygen sensing.
URI: http://hdl.handle.net/2297/25031
資料種別: Journal Article
版表示: publisher

このアイテムを引用あるいはリンクする場合は次の識別子を使用してください。 http://hdl.handle.net/2297/25031



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